JPH0377434U - - Google Patents
Info
- Publication number
- JPH0377434U JPH0377434U JP13804089U JP13804089U JPH0377434U JP H0377434 U JPH0377434 U JP H0377434U JP 13804089 U JP13804089 U JP 13804089U JP 13804089 U JP13804089 U JP 13804089U JP H0377434 U JPH0377434 U JP H0377434U
- Authority
- JP
- Japan
- Prior art keywords
- generation chamber
- plasma generation
- plasma
- small
- diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005284 excitation Effects 0.000 claims description 2
- 230000005684 electric field Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13804089U JPH0521873Y2 (en]) | 1989-11-30 | 1989-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13804089U JPH0521873Y2 (en]) | 1989-11-30 | 1989-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0377434U true JPH0377434U (en]) | 1991-08-05 |
| JPH0521873Y2 JPH0521873Y2 (en]) | 1993-06-04 |
Family
ID=31685170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13804089U Expired - Lifetime JPH0521873Y2 (en]) | 1989-11-30 | 1989-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521873Y2 (en]) |
-
1989
- 1989-11-30 JP JP13804089U patent/JPH0521873Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0521873Y2 (en]) | 1993-06-04 |